DC power supplies for magnetron Sputtering and Plasma generation
DC power Supplies for Magnetron Sputtering and Plasma generation
DC power supplies for Sputtering and Plasma generators manufactured by Vac Techniche Ltd are reliable devices for industrial and laboratory deposition, plasma generation, and even dielectric heating and melting.
This device is also one of the most important components of semiconductor manufacturing systems, used for producing integrated circuits (ICs) and chips present in modern computers and electronic equipment
The Vac Techniche high-voltage power supplies are offered in the 800-120000 V range.
An important feature of the high voltage power supplies is the low storage energy in the output stage and their small size.
Arc Management, If the output is short-circuited, the device will be disabled automatically and reset after about 750 milliseconds to the set value.
High stability, remote control capability, controllable output current, arc management and various types of protection, voltage and current display, and a user interface panel have all turned these high-voltage power supplies into reliable industrial products.
Larger power supplies also available.
| DS82VT DC sputtering supply for 1” and 2” | |
| input power | 220 V (200-230), 50 (50-60) Hz |
| Output voltage (DC) | Adjustable up to 800V. |
| Output Current (DC) | Adjustable up to 600 mA (adjustable current Limit). |
| Line regulation | less than 0.5% |
| Load regulation | less than 0.5% |
| Output ripple | If the load resistance is stable and the momentary changes doesn’t exist, depending on the output voltage, varies between half and one percent. |
| Output sustainability | About 15 minutes after adjusting the voltage and reaching the temperature stability, less than 0.5% per hour and after an hour, less than 0.5% per day. |
| Display | Voltage-Current (3 digits) |
| Protection | Over temperature, short circuit, overvoltage protection, ground wire disconnection protection. |
| Arc management | If the output is short-circuited, the device will be disabled automatically (in less than 100µs) and reset after 750 milliseconds to the set value. |
| Remote control | Analog |
| Working temperature | 10-40 degrees centigrade |
| Cooling | Air-cooled by fan |
| Output connector | N type |
| Box Material | Aluminum |
1" and 2" DC power supply with arc control
| DS82VT DC Sputtering Power Supply | |
| input power | 220 V (200-230), 50 (50-60) Hz |
| Output voltage (DC) | Adjustable up to -800V. |
| Output Current (DC) | Adjustable up to -200 mA (adjustable current Limit). |
| Line regulation | less than 0.5% |
| Load regulation | less than 0.5% |
| Output ripple | If the load resistance is stable and the momentary changes doesn’t exist, depending on the output voltage, varies between half and one percent. |
| Output sustainability | About 15 minutes after adjusting the voltage and reaching the temperature stability, less than 0.5% per hour and after an hour, less than 0.5% per day. |
| Display | Voltage-Current (3 digits) |
| Protection | Over temperature, short circuit, overvoltage protection, ground wire disconnection protection. |
| Arc management | If the output is short-circuited, the device will be disabled automatically and reset after 750 milliseconds to the set value. |
| Remote control | Analog |
| Working temperature | 10-40 degrees centigrade |
| Cooling | Air-cooled by fan |
| Output connector | HN |
| Box Material | Aluminum |
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