Thermal CVD h-BN 2D Growth Systems

Thermal CVD h-BN Growth Systems

Planartech h-BN growth system

PlanarGROW range of Thermal CVD h-BN 2D Growth Systems, have a flexible approach to the growth of h-BN
Planartech, now over 50 systems worldwide, have installations with the key research institutions.
The planargrowth-2S-BN thermal CVD system design is a horizontal reaction tube with gas inputs, temperature control, gas flow, vacuum and pressure, writable recipe and process storage, controlled with labview allowing remote access.

The standard h-BN system, planarGROW-2S-BN, which acts as our base design providing a foundation for our customers to add their specific requirements.

The standard system can be customized to the user’s specific application requirements. h-BN can be grown from either liquid borazine or solid ammonia borane, and this system supports both precursors. In addition, the system supports dual process use for both h-BN and graphene.
Flexibility of the system design to accommodate our customers is proving to be of great benefit, allowing researchers to request additional functionalities such as:
  • liquid borazine
  • solid ammonia borane.
  • Single reaction tube.
  • Dual reaction tube.
  • Supports Graphene and TMD growth.


  • Research.
  • 2D material Growth.
  • Sensor research
  • Bio-medical research
  • electrical contact enhancement.
  • Multiple layer devices
  • Gold sputtering.
  • Multi sample coating.


  • Linear Process CVD (LPCVD)
  • Quartz or Alumina Furnace Tube
  • Single or Dual furnace tube systems
  • Split furnace
  • Solid Source option
  • Liquid source, precursor options
  • Rapid data input.
  • User friendly software.
  • Accurate Control of growth rate.
  • Manual Control option .
  • individual recipe storage
  • remote access
  • one year
  • CE conformity


  • Quartz or Al2O3 Furnace tube.
  • Furnace tube sizes, 50mm, 75mm, 100mm 125mm and 150mm.
  • Heater: Kanthal Wire with glass wool moulding
  • nominal max working temp 1100C,
  • great temperature options available
  • Solid source option
  • Liquide source with precursor option
  • Minimum of 2 MFC’s, options of addition 4 more.
    • Hydrogen (H2), 100sccm
    • Argon (Ar): 1,000sccm
    • Precursor gas option
  • Pressure control
    • Convection Gauge Controller
    • Capacitance Manometer
    • Motor-Geared Throttle Valve
    • Pressure & Flow Controller
  • Vacuum pumps
    • Rotary or Dry pump
    • Turbo pump
    • Windows PC
    • Labview
  • Safety
    • Water pressure sensors
    • Screen and audible alarm
    • Interlock
  • Average Dimensions and Utilities
    • Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)
    • Weight: ~200kg
    • Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A
    • Air: 4-5kgf/cm2
    • Water: 2-3kgf/cm2..where required

Options and Accessories

  • Furnace tube material and size options
  • Replacement Quartz Furnace tubes
  • Inner Quartz tubes

Installation and Training

  • On site and remote training provided.
    • System price included Installation.
    • System price includes on-site training.
    • Additional training to new users by remote access

Warranties & Policies

  • standard warrantee
    • Covers all parts and computer.
    • Excludes Furnace tube, O ringsli>
    • Additional training to new users by remote access
  • Shipping policy
    • Shipped direct to users site
    • Incoterms CIP or DDP,
    • No hidden costs