RF Manual Matching network units (Variable Inductor)

RF Variable Induction Manual Matching Unit

BDISCOM Variable Induction Manual Matching Unit

The BDS VIMM (Variable Induction Manual Matching Unit) is probably the most compact RF inductive manual matching network available on the market having unique features:

Ideal for the production of low pressure plasma system like sputtering, PECVD, plasma cleaning, plasma etching and plasma activation.

Being one of most compact units available today adds to its key feature and increases the advantages of the internal variable inductor circuit over standard configurations.

Locally positioned installation directly above the vacuum chamber electrical feedthrough.

The mechanical layout can be adjusted to match any customer requirement.


Services and Dimensions

  • Power Supply.
    • 120 or 240Vac Phase
    • 13 Amps Max
    • 50-60 Hz with PFC/li>
  • Dimensions
    • Rack Mount
    • 112 x 70 x 136mm

Output Specifications

  • RF Input: BNC Female
  • DC bias: BNC Femle
  • Working Frequency
    • 13.56 MHz
  • Max RF Current: 6 Ampls
  • Max RF Voltage: 3000Vac
  • Max input power: 200 Watts

General specifications

  • Cooling
    • Cooling Forced air, high efficiency heat sinks operate up to 40°C ambient temperature.
    • Ambient working temp 10 to 40 Celsius
    • No condensing or Icing
  • Internal Output matching transformer
  • CE Conformity