Services and Dimensions
- Power Supply.
- 120 or 240Vac Phase
- 13 Amps Max
- 50-60 Hz with PFC/li>
- Rack Mount
- 112 x 70 x 136mm
The BDS VIMM (Variable Induction Manual Matching Unit) is probably the most compact RF inductive manual matching network available on the market having unique features:
Ideal for the production of low pressure plasma system like sputtering, PECVD, plasma cleaning, plasma etching and plasma activation.
Being one of most compact units available today adds to its key feature and increases the advantages of the internal variable inductor circuit over standard configurations.
Locally positioned installation directly above the vacuum chamber electrical feedthrough.
The mechanical layout can be adjusted to match any customer requirement.