RF Power supplies for Sputter systems

RF Power Supplies for Sputter Systems

BDISCOM RF Power Supplies with interactive Touch Screen

BDISCOM RF family of low-medium power RF generators (HF) have been designed to provide reliable and consistent RF generator for the research laboratories and industrial requirements.
The 200W, 300W and 750W Units have been design to make it easy to exchange with most known RF power supplies, having been adapted over the years to accommodate for most applications, the laboratory at BDISCOM is constantly working with researchers to provide specialist equipment that is not provided by our competitors.
An example of this, is the request from a system builder who had a requirement to adapt the standard RF power supply with a Square-wave Input facility for a system being manufactured for a UK University’s PLCVD system.
BDISCOM are the right size to both accommodate modifications, they are able to accommodate most requests from both the Research, OEM and Industrial customers.
Having this flexibility, BDISCOM built long term relationships with their customers, constantly working together to reach a common goal.
One of the key advantages of the BDISCOM RF power supply is the ability to work with 2 matching networks, allowing savings on the RF generation units.
Category:

Services and Dimensions

  • 200W, 300W and 750W options
  • Power Supply.
    • 120 or 240Vac Phase
    • 13 Amps Max
    • 50-60 Hz with PFC/li>
  • Dimensions
    • Rack Mount
    • 132.5 x 269 x 410mm
    • Weight 5 Kg

Output Specifications

  • Output frequency 13.56 MHz +/- 0.005% quartz controlled
  • Output on 50 Ohm Load
    • From 4 to max 750 W
    • 20% reflective max power
    • -40 dB harmonic content
  • RF N, female connector
  • User port, D-Type 9 pin female
  • UInterlock function and remote RF ON

General specifications

  • Cooling
    • Forced Air
    • Ambient working temp 10 to 40 Celsius
    • No condensing or Icing
  • Power detection, Forward and reverse, Linear Scales 3% accuracy
  • Touch Screen Display
  • Matching network 25 pin D Type
  • Optional Driver for 2 auto matching networks
  • Fully matched with BDISCOM Matching units
  • CE Conformity