Thermal CVD MoS2 and TMD Growth Systems

Thermal CVD MoS2/TMD Growth Systems

Planartech 2D growth systems

PlanarGROW range of thermal CVD MoS2 / TMD growth systems have a flexible approach to the growth of MoS2 and other metal dichalcogenides.
Planartech, now over 50 systems worldwide, have installations with the key research institutions.
The planargrowth-2S-MoS2 thermal CVD system design is a horizontal reaction tube with gas inputs, temperature control, gas flow, vacuum and pressure, writable recipe and process storage, controlled with labview allowing remote access.

The standard MoS2 system, planarGROW-2S-MoS2, which acts as our base design providing a foundation for our customers to add their specific requirements.

The standard system can be customized to the user’s specific application requirements. MoS2 can be grown from solid sources or gas precursors. In addition, the system supports dual process use for both MoS2 and graphene.
Flexibility of the system design to accommodate our customers is proving to be of great benefit, allowing researchers to request additional functionalities such as:
  • MoS2 from solid source, (Sulphur powder and MoO3)
  • Precursors gas lines
  • Single reaction tube.
  • Dual reaction tube.
  • Supports Graphene and TMD growth.

Applications

  • Research.
  • 2D material growth
  • Sensor research
  • Bio-medical research
  • electrical contact enhancement.
  • Multiple layer devices

Features

  • Linear Process CVD (LPCVD)
  • Quartz or Alumina Furnace tube
  • Single or Dual furnace tube options
  • Split furnace
  • Solid Source
  • Rapid data input.
  • User friendly software.
  • Accurate Control of growth rate.
  • Manual Control option .
  • individual recipe storage
  • remote access
  • one year
  • CE conformity

Specifications

Quartz or Al2O3 Furnace tube.

  • Furnace tube sizes, 50mm, 75mm, 100mm 125mm and 150mm.
  • >Heater: Kanthal Wire with glass wool moulding
  • nominal max working temp 1100C
  • Minimum of 3 MFC’s, options of addition 3 more.
    • Hydrogen (H2), 100sccm
    • Argon (Ar): 1,000sccm
    • Precursor gas sccm
  • Solid Source option
  • Pressure control
    • Convection Gauge Controller
    • Capacitance Manometer
    • Motor-Geared Throttle Valve
    • Pressure & Flow Controller
  • Vacuum pumps
    • Rotary or Dry pump
    • Turbo pump
  • System control
    • Windows PC
    • Labview
  • Safety
    • Water pressure sensors
    • Screen and audible alarm
    • Interlock
  • Average Dimensions and Utilities
    • Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)
    • Weight: ~200kg
    • Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A
    • Air: 4-5kgf/cm2
    • Water: 2-3kgf/cm2..where required

 

Options and Accessories

  • Replacement Furnace tubes
  • Inner tubes
  • upgrades available
  • Additional precursors
  • Additions MFC’s

Installation and Training

  • On site and remote training provided.
    • System price included Installation.
    • System price includes on-site training.
    • Additional training to new users by remote access

Warranties & Policies

  • standard warrantee
    • Covers all parts and computer.
    • Excludes Furnace tube, O ringsli>
    • Additional training to new users by remote access
  • Shipping policy
    • Shipped direct to users site
    • Incoterms CIP or DDP,
    • No hidden costs