Technical Specifications for ATN25BF Matching Unit
|Applied Power||220 (200-240) V, 50 (50-60) Hz|
|Maximum Input Power||5000 W for standard load such as sputtergun (limitted to voltage 25KV and current 120 A)|
|Matching network controlling connector||VGA|
|Working modes||Manual, Automatic, Preset|
|Matching speed||Depending on the load conditions between 5 and 30 seconds and when following the matching point is less than 5 seconds.|
|Controller characteristics||when capacitors reach to the beginning and end, an alarm will be activated.
It has two steps (quick and accurate) for the tuning the location of capacitors.
It has a digital display of the location of capacitors.
It has a LED to show the mode.
It has a screw in priest mode to adjust capacitors location
adjustable gain of control loop for achieving optimal speed and stability
|Circuit topology||L Network|
|Voltage-Current-Capacity of Capacitors||25KV-120A-500PF|
|Output impedance||A wide range. It performs matching for the standard sputtering cathode to a wide range.|
|Working temperature||10-40 C|
|Cooling||Air-cooled via Fan and water|
|Output connector||direct connection|
|Weight||about 12 Kg|